http://silicon-value.com/technology/silicon-characterization/ Silicon characterization, silicon conductivity, silicon density, silicon deposition http://silicon-value.com/technology/silicon-characterization/793/ulvac-rolls-pecvd-for/ Thu, 16 Jul 2009 14:32:56 -0700 http://silicon-value.com/technology/silicon-characterization/793/ulvac-rolls-pecvd-for/ Ulvac Inc. (Chigasaki, Japan) has developed a plasma-enhanced chemical vapor <b>deposition</b> (PECVD) system for microcrystalline <b>silicon</b> (μc-Si) <b>deposition</b>, aimed at tandem thin-film ...